発表 Publication

論文一覧(2024年度)

1 T.Takagi, T.Ninomiya, M.Niwa, S.Obara, T. Momose, Y.Shimogaki, M.Nomura, H.Fujioka, M.Mori, and T.Kuroda,
"High thermal conductivity AlN films for advanced 3D Chiplets,"
VLSI Symposium 2024, Technical Session, 2024.6.18
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